The University of Regensburg is planning to procure a new sputtering system in the Faculty of Physics.

The sputtering system is intended to take over the deposition of antiferro- and ferromagnetic materials, as well as materials with a high spin-Hall angle (e.g. Pt, Ta, W) and good magnetic coupling properties (e.g. Ru, Ir) of two magnetic layers. There will be at least 8

Sputtering source flanges required for 2" sputtering sources.

Sputtersystem