Plant for reactive ion milling
In this award procedure, a system for reactive ion milling with SIMS (secondary ion mass spectrometry) endpoint detection is to be procured for the cryptanalysis department of ZITiS (Central Office for Information Technology in the Security Sector).
The ion thinning system to be procured must be able to remove chip material (silicon dioxide (SiO2)) and all other components (such as copper (Cu), aluminum (Al), passive materials (e.g. Si3N4) from chips as quickly and accurately as possible without contamination.