Laboratory, optical and precision equipments (excl. glasses) | Tenderlake

Laboratory, optical and precision equipments (excl. glasses)

Contract Value:
-
Notice Type:
Contract Notice
Published Date:
13 October 2023
Closing Date:
08 November 2023
Location(s):
DE DEUTSCHLAND (DE Germany/DEUTSCHLAND)
Description:
Laborausrüstung Innovationszentrum HH | Ion Beam Etching

For the structuring of metallic layers in particular, an ion beam etching system (IBE) is required. This should also support reactive ion beam etching (RIBE) and chemically assisted ion beam etching (CAIBE) as processes. Among other things, the processes are intended to structure Au, Al and SiO2 thin films on 150 mm wafers by means of a paint mask.

For the structuring of metallic layers in particular, an ion beam etching system (IBE) is required. This should also support reactive ion beam etching (RIBE) and chemically assisted ion beam etching (CAIBE) as processes. Among other things, the processes are intended to structure Au, Al and SiO2 thin films on 150 mm wafers by means of a paint mask.

Object of the order

• System according to specification incl. delivery, commissioning, acceptance and training

• Service and maintenance according to specification

Detailed description in Appendix 01 Terms of Reference (LB IBE) in the tender documents.

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The Buyer:
Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR)
CPV Code(s):
38000000 - Laboratory, optical and precision equipments (excl. glasses)