The objects of this invitation to tender are two (2) stand-alone quartz furnaces:

Equipment 1: Stand-alone quartz furnace for annealing of silicon wafers.

Equipment 2: Stand-alone quartz furnace for oxidation of silicon wafers.

The technical specifications of the equipment to be supplied are defined in more detail in the tendering documents.

Both furnaces will be installed in VTT's Micronova cleanroom, which is equipped for fabrication of silicon-based devices (cleanroom class ISO4).

The objective is to find a professional supplier that can guarantee a high standard of quality. VTT Technical Research Centre of Finland will choose one supplier from among the tenderers.

The tenderers are requested to submit their tender in accordance with the invitation to tender and the accompanying documents. The tendering documents are available, free of charge, in VTT Registry office.

Please, address the requests for the tendering documents to kirjaamo@vtt.fi