As part of the European ERC AQdtive project, the Institut des NanoSciences de Paris (INSP), UMR 7588, is seeking to acquire a multi-crucible evaporator coupled to a glove box.

Basic offer: Multi-crucible evaporator connected to an existing glove box of Jacomex GP concept model

Variant offer: Multi-crucible evaporator connected to a glove box

Desired features and technical specifications

Automated thermal evaporative deposition system with 3 crucibles, two inorganic and one organic – base pressure 10-7 mbar.

Sources can be turned on sequentially (no co-evaporation)

The specimen holder must be compatible with specimens up to 4 inches and must allow attachment of other specimen holders.

It must be possible to control the deposit either by controlling the heating power or by controlling the temperature of the crucible.

The evaporator must be interfaced with a glove box, which can be either a new glove box (see article 3.2 Variant) or compatible with the existing model (basic offer) (Jacomex GP concept model, see constraints below)

The evaporator must include a control system for the automation of the deposition process (excluding transfer from the glove box). This includes controlling pumping, sample rotation, different shutters, and crucible heating.

The control system must also be able to monitor the internal pressure and control the start-up of the various pumps

The sample holder of the evaporator must allow the sample to rotate during sample deposition and cooling

The evaporator must include a deposit thickness measurement system which, in addition to measuring, must be automated to control the opening of the source and sample valves.

In order to make the instrument compatible with measurements made in the same room, the interfacing software must allow to be able to stop/restart the tower pumps (primary and turbo) while keeping the static vacuum frame (the latter can be degraded compared to the dynamic vacuum situation.

Under the variant, the desired functionalities and performance of the glove box are as follows:

• At least three gloves for handling, to maintain a handling space next to the evaporator

• Must allow operation around 1 ppm O2 and 1 ppm H2O

• Must include two entrance airlocks, one small (diameter around 16 cm) for routine and a larger one (diameter around 36 cm) for large equipment entrances.

• A flush procedure must be offered

• Must be supplied with nitrogen with a pressure between 1 and 6 bar

All other specifications in the consultation documents are the minimum requirements that variants must meet.

The number of variant offers is limited to: 3

Two (2) possible additional benefits (PSE) are offered:

PSE n°1: Maintenance at the end of the warranty

EPS n°2: Protective liners to limit chamber contamination