At the Hamburg Innovation Centre, quantum computers using ion trap technology are being built in a clean room provided by DLR in cooperation between industry and DLR. To equip the new cleanroom, a specific machine park for the production, processing and integration of ion trap chips and related quantum technologies will be procured. As part of this tender, equipment for a classic microstructuring process chain for the cleanroom will be procured. Part of the process chain is the deposition and structuring of metallic, dielectric and semiconductor thin films on substrates with a maximum diameter of 150 mm. The tender only covers the specified facilities, the media and peripherals required for this will be provided separately by DLR.

For the deposition of metallic thin films, a magnetron sputtering system is required. This is intended to deposit various multilayer systems on 150 mm substrates. In order to avoid a rupture of the vacuum atmosphere between the individual process steps, a process chamber with several sputtering sources is required.