    
                        Laboratory, optical and precision equipments (excl. glasses)
                    
                                Contract Value:
                                  - 
                                Notice Type:
                                Contract award notice
                            
                                Published Date:
                                16 July 2019
                                Closing Date:
                                
                                Location(s):
                                        DEE02 Halle (Saale), Kreisfreie Stadt (DE Germany/DEUTSCHLAND)
                            
                        Description:
                        
                        PECVD und ALE System
Plasma Enhanced Chemical Vapour Desposition (PECVD) System und Atomic Layer Etching (ALE) System.
1 PECVD System 1 ALE System

                                Awarded to:
                                        PECVD und ALE System
                                        Oxford Instruments GmbH, Wiesbaden (DE)
                            
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                            The Buyer:
                            Max-Planck-Institut für Mikrostrukturphysik
                            
                            CPV Code(s):
                                38000000 - Laboratory, optical and precision equipments (excl. glasses)