Laboratory, optical and precision equipments (excl. glasses) | Tenderlake

Laboratory, optical and precision equipments (excl. glasses)

Contract Value:
-
Notice Type:
Contract Notice
Published Date:
08 June 2023
Closing Date:
14 July 2023
Location(s):
CH0 SCHWEIZ/SUISSE/SVIZZERA (CH Switzerland/SCHWEIZ/SUISSE/SVIZZERA)
Description:
100 kV high-resolution e-beam lithography system (EBL)

100 kV high resolution electron-beam lithography system with a Gaussian beam for the new cleanroom of the Photon Science division of Paul Scherrer Institute (PSI).

Details see in specification PSI-HK67-001 Rev. 2.00

100 kV high resolution electron-beam lithography system with a Gaussian beam for the new cleanroom of the Photon Science division of Paul Scherrer Institute (PSI).

Details see in specification PSI-HK67-001 Rev. 2.00

Download full details as .pdf
The Buyer:
Paul-Scherrer-Institut (PSI), Strategischer Einkauf (do not open)
CPV Code(s):
38000000 - Laboratory, optical and precision equipments (excl. glasses)