100 kV high resolution electron-beam lithography system with a Gaussian beam for the new cleanroom of the Photon Science division of Paul Scherrer Institute (PSI).
Details see in specification PSI-HK67-001 Rev. 2.00
100 kV high resolution electron-beam lithography system with a Gaussian beam for the new cleanroom of the Photon Science division of Paul Scherrer Institute (PSI).
Details see in specification PSI-HK67-001 Rev. 2.00