The University of the Bundeswehr Munich (UniBw M) was founded in 1973 at the request of the then Federal Minister of Defence, Helmut Schmidt, under the name "Hochschule der Bundeswehr München". It is one of two universities that the Bundeswehr has to train its officer candidates and young officers. The university belongs to the civil organisational area of human resources and is assigned to the Federal Ministry of Defence.
On 11.08.2020, UniBw M founded a new "Center for Digitization and Technology Research of the Bundeswehr" (DTEC.Bw for short). DTEC.Bw is part of the Federal Government's economic stimulus plan to overcome the COVID-19 crisis and will be provided with research funds from the economic stimulus plan via the Federal Ministry of Defence (BMVg).
As part of the DTEC project, the Bundeswehr University in Munich is planning to procure a mask aligner for the exposure of silicon wafers. The flexibility of the device and the achievable results are essential.
For the project, UniBw M intends to procure a mask aligner as part of this award procedure.
For the VITAL-SENSE project, UniBw M needs a mask aligner to expose silicon wafers. In the field of semiconductor technology, so-called lithography plays a decisive role. In order to produce finished components, high demands are placed on reproducibility and quality of the results.
The mask aligner must meet the high purity requirements, accuracy of adjustment, resolution and homogeneity of semiconductor technology.
The subject of the order is delivery, installation and commissioning
by platesetter for semiconductor technology - Mask Aligner. As part of the commissioning, the contractor must introduce the staff of UniBw M into the operation of the mask aligner.
The UniBw M requires 1 mask aligner, which can handle 4", 6" and 8" wafers.
UniBw M has a total budget of EUR 428,155.00 (net) available for the delivery, installation and commissioning of the mask aligner. UniBw M reserves the right to exclude offers that exceed this cost framework from the procedure and to cancel the procedure if only offers above the budget are received.
The winning bidder must deliver, install and commission the Mask Aligner by 15.03.2023 at the latest. The successful bidder must assume a guarantee for the functionality and quality of the mask aligner for a period of 24 months from acceptance.
Details can be found in the service description (Annex 1 to the supply contract,
Appendix 2).
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