The subject of the contract is a low-pressure plasma device for cleaning and activation of material surfaces with a smoothly adjustable, precise gas flow controller with a resolution of 1 sccm. A detailed description of the subject of the contract is attached as Annex 4 to the SWZ
The subject of the contract is a low-pressure plasma device for cleaning and activation of material surfaces with a smoothly adjustable, precise gas flow controller with a resolution of 1 sccm. A detailed description of the subject of the contract is attached as Annex 4 to the SWZ