The purpose of this contract is the supply, installation and commissioning of an electron beam lithography system for the Nanofabrication laboratory of the Institut Català de Nanociència i Nanotecnologia (ICN2).
The equipment is part of project EQC2021-007544-P funded by MCIN/AEI/10.13039/501100011033 and the European Union Next GenerationEU/PRTR
The purpose of this contract is the supply, installation and commissioning of an electron beam lithography system for the Nanofabrication laboratory of the Institut Català de Nanociència i Nanotecnologia (ICN2)
The equipment is part of project EQC2021-007544-P funded by MCIN/AEI/10.13039/501100011033 and the European Union Next GenerationEU/PRTR