At the Hamburg Innovation Centre, quantum computers using ion trap technology are being built in a clean room provided by DLR in cooperation between industry and DLR. For the equipment of the new cleanroom, a specific machine park for the production, processing and integration of ion trap chips and related quantum technologies will be procured. As part of this tender, equipment for a classic microstructuring process chain for the cleanroom will be procured. Part of the process chain is the deposition and structuring of metallic, dielectric and semiconductor thin films on substrates with a maximum diameter of 150 mm. The tender only covers the specified facilities, the media and peripherals required for them are provided separately by DLR.

Description | Procurement of an evaporation system

An evaporation system is required for the deposition of metallic thin films. The material to be applied is evaporated via an electron beam evaporator and deposited on 150 mm substrates. Among other things, the process is intended to support lift-off structuring via deposition on pre-structured paint masks.

Object of the order

• System according to specification including delivery, commissioning, acceptance and training

• Service and maintenance according to specification

Details: See Appendix 02_LB_AufdampfAnlage