The subject of the contract is the delivery, installation, commissioning, testing of a brand new plasma etching device (RIE, reactive ion etching) in inductively coupled plasma (ICP) with an atomic layer etching module (ALE) along with warranty, service, documentation and training.
The subject of the contract is the delivery, installation, commissioning, testing of a brand new plasma etching device (RIE, reactive ion etching) in inductively coupled plasma (ICP) with an atomic layer etching module (ALE) along with warranty, service, documentation and training.