CEA / LETI plans to acquire thickness measurement and topography equipment.

Installed in a clean room, it must be class 100 compatible.

CEA / LETI plans to acquire thickness measurement and topography equipment. Installed in a clean room, it must be class 100 compatible.

It will make it possible to carry out the following measurements:

- total thickness measurement (between 200 μm and 2 mm) associated with the variation in total thickness (TTV),

- measurement of deflection, deformation and depth of trenches,

- measurement of individual layers on different possible substrates (unitary layer or layer in a given stack).

For 200 and 300 mm diameter plates, the equipment must operate in fully automatic mode.

For samples and plates of diameter between 25 and 150 mm, loading can be done in manual mode but the rest of the operations must be carried out in automatic mode.