SEE Laser test system:
— Single-Photon Absorption in Silicon-based technologies, to be used with backside irradiation,
— Pulse length less than 1 picosecond,
— Puls repetition rate variable from single-shot to at least 500 kHz,
— Pulse Energy variable,
— system shall be upgradeable to enable Two-Photon-Absorption testing,
— Imaging system for positioning of the DUT, resolution sufficient to identify on-chip features,
— DUT/Beam positioning: automated, X-Y-Travel range at least 20x20 mm, positioning repeatability better than 0.5 Müm, resolution at least 0.1 Müm, software-controllable, Z-Travel TBD,
— System shall be conformant to Laser Class 1 in all areas accessible by the user,
— System shall be conformant to EU directive on machinery.
SEE Laser test system
— Single-Photon Absorption in Silicon-based technologies, to be used with backside irradiation,
— Pulse length less than 1 picosecond,
— Puls repetition rate variable from single-shot to at least 500 kHz,
— Pulse Energy variable,
— system shall be upgradeable to enable Two-Photon-Absorption testing,
— Imaging system for positioning of the DUT, resolution sufficient to identify on-chip features
— DUT/Beam positioning: automated, X-Y-Travel range at least 20x20 mm, positioning repeatability better than 0.5 Müm, resolution at least 0.1 Müm, software-controllable, Z-Travel TBD,
— System shall be conformant to Laser Class 1 in all areas accessible by the user,
— System shall be conformant to EU directive on machinery.