CEA-Leti wishes to acquire millisecond annealing equipment. This equipment is intended to process plates with a diameter of 300mm and will be used to carry out the annealing steps of the FEOL and MOL, necessary for the development of advanced FDSOI technologies 10nm and beyond.

The proposed contract includes technical options that are described in the tender documents.

CEA-Leti wishes to acquire one (1) millisecond annealing equipment. This equipment is intended to process plates with a diameter of 300mm and will be used to carry out the annealing steps of the FEOL and MOL, necessary for the development of advanced FDSOI technologies 10nm and beyond. The services provided with this equipment include the associated services that are inseparable, such as installation, training, warranty, etc.

A number of technical options are described in the consultation package.

The object of the contract is the supply of millisecond annealing equipment and associated services, a single lot which may not be the subject of an allotment.