THE SUBJECT MATTER OF THIS CONTRACT IS THE SUPPLY AND INSTALLATION OF AN SEM AUTOMATION SOFTWARE PACKAGE THE INTERNATIONAL IBERIAN NANOTECHNOLOGY LABORATORY

This tender is for the supply and installation of an automation software package to be integrated to the installed FEI Nova NanoSEM equipment at the International Iberian Nanotechnology Laboratory (INL) in Braga, Portugal. The software must enable the full automation of the scanning electron microscope for metrology recipe creation, image and edge recognition, scanning and stage movements.

- Recipes design to enable automate milling, scanning, image recognition, detector set-up, stage movement up to 8 inch wafer size, electron beam and ion beam settings, gas injection, and other functions.

- Graphical environment to allow intuitive logic operations, looping and editing of existing recipes.

- Graphical programming environment

- FIB column controls: Imaging, milling, deposition, apertures, accelerating voltage

- SEM column controls: Imaging, deposition, accelerating voltage, beam current

- Alignment tools: Image recognition, edge finding

- If-Then logical operations

- Looping using either a fixed value or until a conditional statement is met.

- Inclusion of a recorder, which records the users on tool actions and places them into a recipe, which can be rerun as is, or added to a larger recipe.

- One additional software license for installation on a remote PC

- All required hardware such as hard disks, communication units and monitors must be included in the package.