General information:
— In order to estimate the consequential costs after the end of the warranty, a plan for the procurement of spare parts for the following 3 years must be issued,
— The plant is set up in a cleanroom class ISO 3-5.
The installation shall meet the following requirements:
— Maximum size (w x L x h): 1.00 m x 1.65 m x 2.50 m,
— machining of 8" Si substrates in batch (1x25),
— the installation must be state-of-the-art,
- Compatible with Entegris A192 — 81M (low profile PFA-Carrier) carrier,
— a process tank compatible with aqua regia (composition: 7 parts by volume 37% HCl and 1 volume part 65% HNO3) and can be heated to at least 90 degrees,
— possibility to dilute the aqua regia with DIW up to a ratio of 1:1 (composition: 7 volume parts 37% HCl and 1 volume part 65% HNO3 and 8 parts DIW),
— Optional: Carrier can be moved in the process basin (agitation),
— A DIW sink,
— the ability to spike HCl and/or HNO3 at specific times before and during the process,
— Manual loading and unloading, automatic transfer of the carrier between the process and sink,
— filling the process tank with is carried out from the central supply,
— Disposal of process chemicals from the process basin is carried out in a central waste disposal,
— Circulation filtration for process pools: pump and 0.1? m filter (type: Pall ABF1UFT3EH1K3),
— Maintenance work is only possible from the front of the front and back of the system, and cannot be accessed from the system side,
- All controls must be located on the front of the system,
— Ergonomic user interface (freely positionable screen),
— Front panel signal lights (min. red, yellow, green),
— Electrical connections: 230/400VAC 50Hz TN-S network (N/PE disconnected),
— the current version of the EC Machinery Directive must be complied with,
— 2014/30/EU EMC is fulfilled,
— Shelf must be CE certified.
Software:
— Available in German language,
— Multiple password-protected user levels,
— Multiple recipes can be saved
— Individual recipes can be created with the greatest possible flexibility of process parameters,
— Logging user activity, processes, and error messages.
Additional Requirements:
— 12 months warranty,
— plant training for operators/maintenance/process engineers,
— manuals in German, available digitally and printed on clean room paper,
— spare parts kit (please specify)
— Delivery to Incoterm 2010 DDP, DPU or DAP
— For deliveries outside the EU, the supplier is also the importer
— Media connections are to be defined in a technical clarification discussion.
General information:
— In order to estimate the consequential costs after the end of the warranty, a plan for the procurement of spare parts for the following 3 years must be issued,
— The plant is set up in a cleanroom class ISO 3-5.
The installation shall meet the following requirements:
— Maximum size (W x L x H): 1.00 m x 1.65 m x 2.50 m,
— machining of 8" Si substrates in batch (1x25),
— the installation must be state-of-the-art,
- Compatible with Entegris A192 — 81M (low profile PFA-Carrier) carrier,
— a process tank compatible with aqua regia (composition: 7 parts by volume 37% HCl and 1 volume part 65% HNO3) and can be heated to at least 90 degrees,
— possibility to dilute the aqua regia with DIW up to a ratio of 1:1 (composition: 7 volume parts 37% HCl and 1 volume part 65% HNO3 and 8 parts DIW),
— Optional: Carrier can be moved in the process basin (agitation),
— A DIW sink,
— the ability to spike HCl and/or HNO3 at specific times before and during the process,
— Manual loading and unloading, automatic transfer of the carrier between the process and sink,
— filling the process tank with is carried out from the central supply,
— Disposal of process chemicals from the process basin is carried out in a central waste disposal,
— Circulation filtration for process pools: pump and 0.1? m filter (type: Pall ABF1UFT3EH1K3),
— Maintenance work is only possible from the front of the front and back of the system, and cannot be accessed from the system side,
- All controls must be located on the front of the system,
— Ergonomic user interface (freely positionable screen),
— Front panel signal lights (min. red, yellow, green),
— Electrical connections: 230/400VAC 50Hz TN-S network (N/PE disconnected),
— the current version of the EC Machinery Directive must be complied with,
— 2014/30/EU EMC is fulfilled,
— filing must be CE certified
Software:
— Available in German language,
— Multiple password-protected user levels,
— Multiple recipes can be saved
— Individual recipes can be created with the greatest possible flexibility of process parameters,
— Logging user activity, processes and error messages
Additional Requirements:
— 12 months warranty,
— plant training for operators/maintenance/process engineers,
— manuals in German, available digitally and printed on clean room paper,
— spare parts kit (please specify)
— Delivery to Incoterm 2010 DDP, DPU or DAP
— For deliveries outside the EU, the supplier is also the importer
— Media connections are to be defined in a technical clarification discussion.