The purpose of this contract is the supply and installation of a pumping unit with effluent abatement system for dielectric deposition equipment (GT5)

There are 3 process chambers to be equipped as a primary pump and 1 primary pump for the transfer module.

The 3 process chambers must be connected to the proposed abatement system.

The contract provided for an option with optional costing entitled "solution of a system without nitrous oxide (N20) abatement".