The object of the order is the upgrade of the ion implant for wafers up to 200 mm in diameter (Varian CF-3000 medium current beam), consisting in the delivery of a set of parts and their installation in the Ordering Party's laboratory in Piaseczna, along with warranty and service support, documentation.

The object of the order is the upgrade of the ion implant for wafers up to 200 mm in diameter (Varian CF-3000 medium current beam), consisting in the delivery of a set of parts and their installation in the Ordering Party's laboratory in Piaseczna, along with warranty and service support, documentation.