The University of Regensburg (UR) intends to purchase a molecular beam epitaxy facility ("MBE facility") for integration into an existing MBE facility cluster. The integration takes place via docking (CF150) of the MBE system to be procured to the existing linear ultra-high vacuum channel (UHV channel). The sample transfer and acquisition systems of the MBE plant to be procured shall be designed for the 2" wafer holders used in the existing MBE cluster. It is essential to remove the wafer holder from the UHV channel in a vertical position.

Ultrahochvakuum-Molekularstrahlepitaxieanlage

(UHV-MBE)