Supply of vacuum management:
Pack 1 “Pumping System”
Set 2 “Pressure Measurement”
Set 3 “Isolation and Control Valves”
Pack 4 “Mass-Flow Controller”
Set of 5 “Stainless Steel Flange, Components and Feedthrough”
Set of 6 “Glass/Quartz Flange, Viewport and Components”
Pumping systemSee II.2.1
Pressure measurementSee II.2.1
Isolation and control valvesSee II.2.1
Mass Flow ControllerSee II.2.1
Stainless steel flange, components and feedthroughSee II.2.1
Glass//Quartz flange, Viewport and componentsSee II.2.1