The market consists of replacing a III-V epitaxial framework with a new reactor for the epitaxial growth of TMDCs requiring the use of an electron gun for evaporation.
The services are divided into 3 lots, distributed as follows:
- lot 1: supply and installation of an ultra-vacuum reactor for the epitaxy of dichalcogenides,
- lot 2: supply of a multi-electron gun linear evaporator for an ultra-vacuum reactor,
Lot 3: supply of a selenium evaporation cell with a valve for ultra-vacuum reactor.
Supply and installation of an ultra-vacuum reactor for the epitaxy of dichalcogenidesThe purpose of Lot 1 is to replace an existing III-V semiconductor epitaxy frame on substrates less than or equal to 3 inches in size with solid or gaseous source sources.
Supply of a multi-crucible linear electron gun evaporator for ultra-vacuum reactorThe contract concerns the purchase of a multi-crucible linear electron gun evaporator for ultra-vacuum reactor.
Supply of selenium evaporation cell with valve for ultra-empty reactorThe contract concerns the purchase of a selenium evaporation cell with an ultra-vacuum reactor valve.