The Scientific and Technical Services of the UIB need to have a post-processing system for biomaterials and manufacture of state-of-the-art biosensors compatible with the development of applications based on integrated microelectromechanical systems. This system must be applicable both to biosensors operating in gaseous environments and those that include microfluidic systems. Therefore, the aforementioned system must provide the possibility of deposition of thin films using both metallic and insulating materials including various techniques (thermal evaporation, electron beam (E-beam) and sputtering, and pickling in situ). The characteristics of the deposited films shall be determined by means of an optical profilometer which makes it possible to characterise in detail the properties of the deposited layers, including surface topography, roughness and step heights, in accordance with the specifications detailed in the technical specifications. Likewise, it is necessary to have a direct laser writing equipment for micro nano electronic technology to provide the scientific-technical services with an alternative method to optical lithography for the manufacture of components without the need to use contact masks. On the other hand, an inkjet printing system will be included for the selective deposition of polymer layers with predefined patterns, with the possibility of printing by layers.

Physical deposition system of thin films of metals and insulating materials, including thermal evaporation techniques, by electron beam (E-beam) and by "Sputering", and pickling (ion etching) in situ.

3D optical profilometer

Direct laser writing equipment for micro nano electronic technology.

Inkjet printing system for the selective deposition of polymer layers with predefined patterns, with the possibility of printing by layers.