Two on-wafer measuring stations are to be set up

As the core of the measuring station, the large device proposed should contain a high-performance vector network analyzer. This is intended to detect the scattering parameters of the integrated circuits. This applies both to linear s parameters and to frequency-converting parameters in transmission and reception paths. A frequency range of up to at least 170 GHz should be covered in order to be able to serve all current projects. Due to the use of the measuring station for active integrated circuits in silicon technology, the possibility of noise figure determination in the highest possible frequency range and corresponding linearity determination (compression or intermodulation) are also indispensable. The aim is therefore to achieve a maximally flexible basic device that covers this variety of measurement tasks and includes extended options. In addition, the device must enable true full-differential operation in order to be able to operate the differential circuit interfaces customary today and to avoid distortion of the performance parameters due to unnecessary band-limiting baluns with complex deem bedding.

This tender is intended to procure a new measuring station for vector network analysis of integrated sub-millimeter wave circuits including accessories. The setup should meet the requirements for on-wafer measurement technology of active integrated circuits. As the core of the measuring station, the large device proposed should contain a high-performance vector network analyzer. This is intended to detect the scattering parameters of the integrated circuits. This applies both to linear s parameters and to frequency-converting parameters in transmission and reception paths. The sub-millimeter wave frequency ranges of 220-330 GHz and 330-500 GHz are to be covered by combining them with 2 frequency converters each in order to be able to serve all current projects.