DTU Nanolab is the Danish National Centre for Nanofabrication and Characterization. DTU Nanolab offers access, services and expertise in the area of micro and nanofabrication to academia and industry. The scope of this project is the expansion of the cleanroom for nanofabrication. The current DTU Nanolab is a state-of-the-art micro and nanofabrication facility of 1.300 m2. A total of around 400 users from DTU, other Danish universities and industry share the facility.

During the last years the growing activity has left little space for new academic or industrial activities. The capacity for new tool installations is exhausted. Any new installation would require the removal of an existing tool.

The present cleanroom facility is 20 years old. The experience gained in running such a facility has prompted the following aspirations for the expansions:

• The expansion shall be attractive for commercial companies working in the nanotechnology industry to carry out research, prototyping or manufacturing at DTU

• The expansion shall be a showcase for the technology being used and developed at DTU Nanolab

• The cleanroom should facilitate tool move in and provide a plug and play environment enhancing facilities for the development of novel processes and products

• The expansion shall provide an inspiring place for students and researchers to work and learn

The project concerning the new facility is planned west of the existing DTU Nanolab building B346 and will comprise a minimum of three storeys: basement, ground floor and first floor. The main function of the extension is to house a 200mm semiconductor cleanroom and cleanroom gowning connected to the existing cleanroom in B346.

It is an aspiration of this project to achieve a high level of sustainability and create a showcase of low energy cleanroom fabrication to the financial and environmental benefit of the University.