European telematic open tender for the supply of an ultra-high vacuum (UHV) system, "cluster-tool", for the deposition of metals and semiconductor materials for the Department of Physics and Astronomy of the University of Padua.

Procedure partially funded from PNRR resources – Mission 4: Education and research

Component 2: From Research to Enterprise – Implementation of R&D support measures to promote simplification and mobility, Investment 1.4 Strengthening research facilities and creating national R&D champions on some Key Enabling Technologies

CNMS Project – Sustainable Mobiity Center

Investment 1.3: Creation of PE to universities, research centres, companies for the financing of basic research projects, NEST project – NETWORK 4 ENERGY SUSTAINABLE TRANSITION, Thematic area: 2 Future energy scenarios – 2.A Green energies of the future

The contract consists in the supply of an ultra-high vacuum (UHV) plant, also called "cluster-tool", for the deposition of thin films composed of:

- a process module and process and system control module, including an ultra-high vacuum deposition chamber containing 4 cathodes for magnetron sputtering in confocal geometry, (main instrument, fully functioning independently), as described in detail in the Special Tender Specifications – technical part;

- power supplies to apply a DC/RF bias to substrates, as described in detail in the Special Tender Specifications – technical part (Purchase option no. 1);

- system to allow the storage of samples and their insertion into the deposition chamber without interrupting the ultra-high vacuum conditions, as described in detail in the Special Tender Specifications - technical part (Purchase option no. 2);

- ultra-high vacuum deposition chamber, containing 4 cathodes for magnetron sputtering in confocal geometry and related pumping system as described in detail in the Special Tender Specifications – technical part (Purchase option no. 3);

- ultra-high vacuum deposition chamber, containing an electron beam evaporation source, as described in detail in the Special Tender Specifications – technical part (Purchase option no. 4).

Purchase options no. 1, no. 2, no. 3, no. 4 are optional for the Institution.