Delivery of a reactive ion etching system for structuring voluminous 3D bodies and curved surfaces according to the requirements of the specifications (Appendix 1 of the tender documents)

The overall system should consist of the following modules:

- Vacuum process chamber with associated pump technology and cleanroom-side airlock chamber

- Plasmaquelle

- Gas system and exhaust gas purification

- Kühlkreisläufe

- Anlagensteuerung

- Documentation, installation and training

The functional requirements can be found in the terms of reference (Appendix 1 of the tender documents).