The Technical University of Ilmenau intends to expand the technological equipment in the field of research on micro- and nanotechnology. For this purpose, it is planned to procure a flexible Rapid Thermal Processor (RTP) for the thermal processing of samples from chip size to 4" wafers with various material systems from the field of semiconductor, micro- and nanotechnology, with which defined thermal treatments are possible. Temperatures of at least 1300 °C and different atmospheres under which this treatment is carried out should be possible.

The Technical University of Ilmenau intends to expand the technological equipment in the field of research on micro- and nanotechnology. For this purpose, it is planned to procure a flexible Rapid Thermal Processor (RTP) for the thermal processing of samples from chip size to 4" wafers with various material systems from the field of semiconductor, micro- and nanotechnology, with which defined thermal treatments are possible. Temperatures of at least 1300 °C and different atmospheres under which this treatment is carried out should be possible.