In the cleanroom-facilities at the Micro- and Nanotechnology Laboratory at the University of Oslo, we seek to expand the possibilities for high quality deposition of thin films for research and development.

To realize this, a set up with 2-3 chambers with vacuum transfer to existing systems (ALD) and with possibility to transfer to external X-ray spectroscopy.

Development, design and production of the system will be subject to dialogue in the purchase process.

Specifications in tender documents.