Delivery, construction and commissioning of a flexible local in-situ laser heating system (LHS) for samples within a scanning electron microscope including user training. With the LHS, limited sample areas should be subject to a targeted and local thermal influence by a laser-material interaction in a high vacuum. The materials used in the samples come from the field of semiconductor, micro- and nanotechnology. Thermal processing up to or greater than 1000°C should be possible with the LHS.

The Technical University of Ilmenau intends to expand the technological equipment in the field of research on micro- and nanotechnology. For this purpose, it is planned to procure a local in-situ laser heating system for a scanning electron microscope. Detailed requirements are described in the bill of quantities.