Confocal Multi-Target Sputter Molding

Institut Néel wishes to acquire a new machine for thin film deposition by confocal multi-target sputtering. The objective is to deposit functional alloys with perfect control of the chemical composition. The interest of such a machine is to deposit functional layers (magnetic, thermoelectric, piezoelectric) for themes related to "materials for energy". The Equipment shall permit the fabrication of thin films by the method of sputtering under a controlled gas atmosphere on substrates of varying sizes at temperatures greater than or equal to 750°C